{"id":187652,"date":"2025-05-05T09:24:52","date_gmt":"2025-05-05T13:24:52","guid":{"rendered":"https:\/\/www.hajim.rochester.edu\/senior-design-day\/?p=187652"},"modified":"2026-05-04T10:24:33","modified_gmt":"2026-05-04T14:24:33","slug":"asml-demux","status":"publish","type":"post","link":"https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-demux\/","title":{"rendered":"ASML DEMUX"},"content":{"rendered":"\n\n\n<p>In this project, we designed and simulated a compact bulk-optics wavelength demultiplexer for ASML lithography systems. The device separates a broadband light source (500\u20131000 nm) into ten distinct spectral bands spaced 50 nm apart, with high transmission (>70%) and polarization insensitivity (&lt;8%). The system must fit within a 150 mm \u00d7 150 mm \u00d7 40 mm volume and be compatible with multimode fiber input and output. The design is based on reflection and transmission through coated glass plates combined with focusing optics and was modeled and optimized in FRED.<\/p>\n\n\n\n<figure class=\"wp-block-image size-large is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"949\" height=\"1024\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-64-949x1024.png\" alt=\"\" class=\"wp-image-207662\" style=\"width:358px;height:auto\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-64-949x1024.png 949w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-64-278x300.png 278w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-64-768x829.png 768w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-64.png 1062w\" sizes=\"auto, (max-width: 949px) 100vw, 949px\" \/><\/figure>\n\n\n\n<p>We use the patent: U.S. Patent 8,224,136 as a starting point<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"838\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-71-1024x838.png\" alt=\"\" class=\"wp-image-207832\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-71-1024x838.png 1024w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-71-300x246.png 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-71-768x629.png 768w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-71-1536x1257.png 1536w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-71.png 1570w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n[1] H. Matsuura, Optical multiplexer\/demultiplexer module and prism used for the same, U.S. Patent 8,224,136, issued July 17, 2012. Available: https:\/\/patents.google.com\/patent\/US8224136B2\/en.<\/p>\n\n\n\n<p>For the design we have:<br><\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"307\" height=\"442\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-65.png\" alt=\"\" class=\"wp-image-207672\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-65.png 307w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-65-208x300.png 208w\" sizes=\"auto, (max-width: 307px) 100vw, 307px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"452\" height=\"296\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-66.png\" alt=\"\" class=\"wp-image-207682\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-66.png 452w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-66-300x196.png 300w\" sizes=\"auto, (max-width: 452px) 100vw, 452px\" \/><\/figure>\n\n\n\n<p>Our result:<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"723\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-68-1024x723.png\" alt=\"\" class=\"wp-image-207702\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-68-1024x723.png 1024w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-68-300x212.png 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-68-768x542.png 768w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-68.png 1371w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"455\" height=\"264\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-69.png\" alt=\"\" class=\"wp-image-207712\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-69.png 455w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/05\/image-69-300x174.png 300w\" sizes=\"auto, (max-width: 455px) 100vw, 455px\" \/><\/figure>\n\n\n\n<p>We successfully designed and optimized a compact wavelength demultiplexer for ASML lithography systems using sequential coated glass plates without relying on prisms. Both the reflected-based and transmitted-based designs achieved high transmission efficiency (>70%) and polarization insensitivity while maintaining a compact footprint within 150 mm \u00d7 150 mm \u00d7 40 mm. The reflected-based design reached up to 85% efficiency and 0.05 mm spot radius at the output plane using standard optical components. This work demonstrates a scalable and manufacturable solution for high-performance wavelength separation in advanced optical systems. To further advance these designs, creating custom coatings to fit exact needs of the necessary bandwidths would be ideal and analyzing beam divergence throughout the system would give a better idea of its capability to work with multimode fiber input.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>In this project, we designed and simulated a compact bulk-optics wavelength demultiplexer for ASML lithography systems. The device separates a broadband light source (500\u20131000 nm) into ten distinct spectral bands&hellip;<\/p>\n","protected":false},"author":17812,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_coblocks_attr":"","_coblocks_dimensions":"","_coblocks_responsive_height":"","_coblocks_accordion_ie_support":"","_monsterinsights_skip_tracking":false,"_monsterinsights_sitenote_active":false,"_monsterinsights_sitenote_note":"","_monsterinsights_sitenote_category":0,"footnotes":""},"categories":[4442,136],"tags":[],"coauthors":[22382,22392,22402],"class_list":["post-187652","post","type-post","status-publish","format-standard","hentry","category-archive","category-opt-ope-archive"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.5 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>ASML DEMUX - Senior Design Day<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-demux\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"ASML DEMUX - Senior Design Day\" \/>\n<meta property=\"og:description\" content=\"In this project, we designed and simulated a compact bulk-optics wavelength demultiplexer for ASML lithography systems. 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