{"id":187672,"date":"2025-05-05T09:21:30","date_gmt":"2025-05-05T13:21:30","guid":{"rendered":"https:\/\/www.hajim.rochester.edu\/senior-design-day\/?p=187672"},"modified":"2026-05-04T10:36:35","modified_gmt":"2026-05-04T14:36:35","slug":"asml-fiber","status":"publish","type":"post","link":"https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-fiber\/","title":{"rendered":"ASML FIBER"},"content":{"rendered":"\n<p><span class=\"uppercase\">Introduction:<\/span><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>The purpose of this project is to design a low numerical aperture (NA) multimode (MM) fiber to support ASML\u2019s YieldStar (YS) optics sensor for scanning wafers using white light with the wavelength range of 400 to 1000 nm. <img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"50\" class=\"wp-image-190962\" style=\"width: 300px;\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/04\/DDD_Midterm-1.jpg\" alt=\"\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/04\/DDD_Midterm-1.jpg 572w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/04\/DDD_Midterm-1-300x50.jpg 300w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/li>\n<\/ul>\n\n\n\n<ul class=\"wp-block-list\">\n<li>We are also designing another low NA MM fiber to operate at a wavelength of 1070 nm meant to preheat a mirror for a separate lithography machine.                  <img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"55\" class=\"wp-image-190972\" style=\"width: 300px;\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/04\/DDD_Midterm.jpg\" alt=\"\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/04\/DDD_Midterm.jpg 445w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2025\/04\/DDD_Midterm-300x55.jpg 300w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/li>\n<\/ul>\n\n\n\n<ul class=\"wp-block-list\">\n<li>For both designs, we will be using a trench-assisted fiber<\/li>\n<\/ul>\n\n\n\n<p><span class=\"uppercase\">Simulation Method: Beam Propagation Method (BPM)<\/span><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Input Field: Gaussian Field or Fundamental mode<\/li>\n\n\n\n<li>Segment 1: Straight Propagation for 1cm<\/li>\n\n\n\n<li>Segment 2: Bending Propagation for 10 turns, under bending radius of 25mm;<\/li>\n\n\n\n<li>Segment 3: Straight Propagation for 1cm<\/li>\n<\/ul>\n\n\n\n<p>DETERMINING EFFECTIVE NA<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Full field: <img decoding=\"async\" width=\"223px;\" height=\"28px;\" src=\"https:\/\/lh7-rt.googleusercontent.com\/slidesz\/AGV_vUdw-3_kjP8AuqCwxPTEo0hdmFvCcEeTxQE3-JP7wvb9iErR0Z9PBKpQff07jFAo5wQOSNMl-te7dqCgM8mb-MGNxYh7rDl4ALC5SwiUbsusZUQefutRKYPpQE8K2lZQCu2aXG4UVw=s2048?key=iKtqmE-qgdSqWMHSGaIdPkTz\"><\/li>\n\n\n\n<li>For each snapshot: <img decoding=\"async\" width=\"169px;\" height=\"26px;\" src=\"https:\/\/lh7-rt.googleusercontent.com\/slidesz\/AGV_vUeM-QAhlUEFoDdF8ijDoFK0tNsyHonJn5_kUbE5I5nQJw4kF8_8W9AMd_FblfSaLXSyZnfXrkSutBc0JkqpMACNTYg3dBG9Xhac_drbUJGsPiUIdntzNFGUG8YQf7j43ofCnmVVAw=s2048?key=iKtqmE-qgdSqWMHSGaIdPkTz\"><\/li>\n\n\n\n<li>Envelope\u2019s residual propagation constant: <img decoding=\"async\" width=\"132px;\" height=\"26px;\" src=\"https:\/\/lh7-rt.googleusercontent.com\/slidesz\/AGV_vUeiVv2-CF2OEX4ALmSOSAW2M4uC9WtTeGeqdHbMumhTQkX8y1u50y45xl_GhWVP_DBDwiypO6sszjGl5jpYjebkZslkl-O0LJQ3GvrYVJoAuG8eiy-KlqFibbhE5tyYP88_Pjy9yQ=s2048?key=iKtqmE-qgdSqWMHSGaIdPkTz\"><\/li>\n\n\n\n<li>Full propagation constant: <img decoding=\"async\" width=\"127px;\" height=\"24px;\" src=\"https:\/\/lh7-rt.googleusercontent.com\/slidesz\/AGV_vUeIMhbc2V0tsEvhj864Av018MWQu4X3jRqyYWO5W_o_7LA_9ZYgLFKVqK9yeAfR1KCMbgIl5c4QiVziMb0cpYs1KbbOBW7PmJQFysF6HJbv4rXvsWu2QiSX6cKiWHzmka7tzxuAew=s2048?key=iKtqmE-qgdSqWMHSGaIdPkTz\"><\/li>\n\n\n\n<li>Calculate effective n_core: <img decoding=\"async\" width=\"107px;\" height=\"19px;\" src=\"https:\/\/lh7-rt.googleusercontent.com\/slidesz\/AGV_vUfLYhUswNlRLL38FPevy3rS2dLj6jlBaEzGBocVVPF19xwpi9Ln8GUsfuWrLg2RlPhw0b9z2Kt9BOfn3me5iVDkMRJhYgpNUXIZO9HOs_Iajn4G4HMVF8YtT2QfYpIeAcPzsMyQow=s2048?key=iKtqmE-qgdSqWMHSGaIdPkTz\"><\/li>\n\n\n\n<li>Effective NA: <img decoding=\"async\" width=\"184px;\" height=\"37px;\" src=\"https:\/\/lh7-rt.googleusercontent.com\/slidesz\/AGV_vUcVbnq_SxguOVlSJfz-e8zSv2WTznj5GDxzwN9kmrJhIcPQyK7zalU9GoR8CiYgcgqWu_vTOh-d4iiq5cD8T17RozxOjUtk9Ezo83LcgFzsEXEkRtHpdwCBhZc3t-BXeUSvKE4JSg=s2048?key=iKtqmE-qgdSqWMHSGaIdPkTz\"><\/li>\n\n\n\n<li>(Agrawal, 2012)<\/li>\n<\/ul>\n\n\n\n<p>1070 NM PREHEAT SYSTEM: SPECIFICATION<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th><strong>Wavelength range (nm)<\/strong><\/th><th><strong>Fiber type<\/strong><\/th><th><strong>NA<\/strong><\/th><th><strong>Core size (um)<\/strong><\/th><th><strong>Cladding size (um)<\/strong><\/th><th><strong>Bend radius [mm]<\/strong><\/th><th><strong>Bend loss for 10 turns [dB]&nbsp;<\/strong><\/th><th><strong>Propagation loss<\/strong><\/th><\/tr><tr><th><strong>1070&nbsp;<\/strong><\/th><th><strong>MM mode<\/strong><\/th><th><strong>0.105<\/strong><\/th><th><strong>50\/91<\/strong><\/th><th><strong>242+\/-7<\/strong><\/th><th><strong>&lt;25<\/strong><\/th><th><strong>&lt;0.2<\/strong><\/th><th><strong>&lt;100dB\/km<\/strong><\/th><\/tr><\/thead><\/table><\/figure>\n\n\n\n<p class=\"has-text-align-center\">Table 1: Specification Table for the First Design for preheating the mirror<\/p>\n\n\n\n<p class=\"has-text-align-left\"><br><span class=\"uppercase\">1070 nm preheat system: Material Choosing<\/span><\/p>\n\n\n\n<p>For our design, we used silica and fluorine\u2010doped silica as the material.&nbsp;<\/p>\n\n\n\n<p>We then account for fluorine doping by applying a relative index decrease \u0394n=\u22120.31%\u00d7C (where C is wt % F) (Malitson, 1965)<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter is-resized\"><img decoding=\"async\" src=\"https:\/\/lh7-rt.googleusercontent.com\/slidesz\/AGV_vUdbi_xnS2jGio__iLJ50mWGry0ZVjS1QCTcaVTkyV5vyOiTzZcdh_UrvzaSLz6dfg6PJrxa1j1YvqF9PNZTTr1CGGJkmbSYtfdMdeCAXNg-pV5GPtqHiBXHkVksn_lapE4F1AJ0=s2048?key=iKtqmE-qgdSqWMHSGaIdPkTz\" alt=\"\" style=\"width:453px;height:auto\"\/><\/figure>\n<\/div>\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter is-resized\"><img decoding=\"async\" src=\"https:\/\/lh7-rt.googleusercontent.com\/slidesz\/AGV_vUdlU7NAtX64Si2Oho-MiYtwgtSRSRhIK-Y0f6azxdZqL7Voptqhv246xpmEbPfE_wfnwrs5J8psiFVBNJhKMBcnurOjyxgUyQGr5e_uPTQi_kl9sfWuBXtsWh7Io4k406Aj4ywVVw=s2048?key=iKtqmE-qgdSqWMHSGaIdPkTz\" alt=\"\" style=\"width:489px;height:auto\"\/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\">Figure 1: Comparing estimated refractive index and expected index (Tsukuma, 1991).<\/p>\n\n\n\n<p>1070 NM PREHEAT SYSTEM: TOLERANCE FOR DOPING<\/p>\n\n\n\n<p>Through the tables and figures below, we can observe that the NA and Bending loss are relatively insensitive to Cladding doping compared with the trench doping.<\/p>\n\n\n\n<figure class=\"wp-block-table aligncenter\"><table class=\"has-fixed-layout\"><thead><tr><th><strong>Trench doping<\/strong><\/th><th><strong>NA<\/strong><\/th><th><strong>Bend Loss (dB)<\/strong><\/th><\/tr><\/thead><tbody><tr><td>2.2% Wt&nbsp;<\/td><td>0.077<\/td><td>0.2523<\/td><\/tr><tr><td>2.5% Wt&nbsp;<\/td><td>0.074<\/td><td>0.1380<\/td><\/tr><tr><td>2.7% Wt&nbsp;<\/td><td>0.095<\/td><td>0.0886<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"has-text-align-center\">Table 2: The doping tolerance test for Trench material<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/lh7-rt.googleusercontent.com\/docsz\/AD_4nXftTvdyA1TqcGIdxCLPanIVhN_8FNglsL6PyRoUFirukXUOsXU8obPcz_bTNv44thDTM66OkPGRUe0p5t8lb3Ds-YJU2T-BpI-eM-bsTg-IxyEYxsnO_Bia71tASWmOL74QXCw_YQ?key=2un548QBo9ib-u-CupaXhU6T\" alt=\"\"\/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\">Figure 2: The effect of doping in trench material on NA and Bend loss.<\/p>\n\n\n\n<figure class=\"wp-block-table aligncenter\"><table class=\"has-fixed-layout\"><thead><tr><th><strong>Cladding doping<\/strong><\/th><th><strong>NA<\/strong><\/th><th><strong>Bend Loss (dB)<\/strong><\/th><\/tr><\/thead><tbody><tr><td>0.4% Wt&nbsp;<\/td><td>0.076<\/td><td>0.1371<\/td><\/tr><tr><td>0.6% Wt&nbsp;<\/td><td>0.074<\/td><td>0.1376<\/td><\/tr><tr><td>0.8% Wt&nbsp;<\/td><td>0.074<\/td><td>0.1380<\/td><\/tr><tr><td>1.0% Wt&nbsp;<\/td><td>0.072<\/td><td>0.1382<\/td><\/tr><tr><td>1.2% Wt&nbsp;<\/td><td>0.071<\/td><td>0.1385<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"has-text-align-center\">Table 3: The doping tolerance test for Cladding material<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/lh7-rt.googleusercontent.com\/docsz\/AD_4nXcGE68sB0_45WKu75nMotWgqad4a1jFpWFteRg3jGSZnLlD4uN-4CFIvBq-DkrSlMcDu7K2b2yXyVCr7vOqIAqa0AQFvI3keKZNmwZ6GeLlYyDyZXDDVw_9666qcsd8mKKFf-LvgA?key=2un548QBo9ib-u-CupaXhU6T\" alt=\"\"\/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\">Figure 3: The effect of doping in cladding material on NA and Bend loss.<\/p>\n\n\n\n<p><span class=\"uppercase\">1070 nm preheat system: Fiber Design<\/span><\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><td><\/td><td class=\"has-text-align-left\" data-align=\"left\"><strong>Material<\/strong><\/td><td><strong>Thickness (\u03bcm)<\/strong><\/td><td><strong>Refractive Index<\/strong><\/td><td><strong>Tolerance<\/strong><\/td><\/tr><tr><td><strong>Core<\/strong><\/td><td class=\"has-text-align-left\" data-align=\"left\">Pure Silica Oxide<\/td><td>25 (radius)<\/td><td>1.4496<\/td><td>N.A.<\/td><\/tr><tr><td><strong>Trench<\/strong><\/td><td class=\"has-text-align-left\" data-align=\"left\">2.5% fluorine-doped SiO2<\/td><td>8<\/td><td>1.4383<\/td><td>\u00b1 0.2%<\/td><\/tr><tr><td><strong>Cladding<\/strong><\/td><td class=\"has-text-align-left\" data-align=\"left\">0.8% doped SiO2<\/td><td>N.A.<\/td><td>1.4460<\/td><td>\u00b1 0.5%<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"has-text-align-center\">Table 4: Determined specifications for the 1070 nm fiber<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter is-resized\"><img decoding=\"async\" src=\"https:\/\/lh7-rt.googleusercontent.com\/slidesz\/AGV_vUchb6prmLt0Tw6pdkoRBTZShRdyWFh58gX8txdHZjJlBRQA1rl20Cs_pLPuFmjDrgUsfc07XBDLJdcRSc7LAeJo6gAcs04DASWbn8eSewB5E-IZ_PPeXRKpm38llj4vBeMXtx0VMQ=s2048?key=iKtqmE-qgdSqWMHSGaIdPkTz\" alt=\"\" style=\"width:299px;height:auto\"\/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\">Figure 4: The cross-section of the designed trench fiber<\/p>\n\n\n\n<p><span class=\"uppercase\">1070 nm preheat system: Simulation Result&nbsp;<\/span><\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th><strong>Specificatio<\/strong>n<\/th><th><strong>Wavelength range (nm)<\/strong><\/th><th><strong>Fiber type<\/strong><\/th><th><strong>NA<\/strong><\/th><th><strong>Core size (um)<\/strong><\/th><th><strong>Cladding size (um)<\/strong><\/th><th><strong>Bend loss for 10 turns [dB]&nbsp;<\/strong><\/th><\/tr><tr><th><strong>Requiement<\/strong><\/th><th><strong>1070&nbsp;<\/strong><\/th><th><strong>MM mode<\/strong><\/th><th><strong>0.105<\/strong><\/th><th><strong>50\/91<\/strong><\/th><th><strong>242+\/-7<\/strong><\/th><th><strong>&lt;0.2<\/strong><\/th><\/tr><tr><th><strong>Simulation<\/strong><\/th><th><strong>1070<\/strong><\/th><th><strong>55 modes<\/strong><\/th><th><strong>0.074<\/strong><\/th><th><strong>50<\/strong><\/th><th><strong>NA<\/strong><\/th><th><strong>0.01384<\/strong><\/th><\/tr><\/thead><\/table><\/figure>\n\n\n\n<p class=\"has-text-align-center\">Table 5: Fiber design results<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter is-resized\"><img decoding=\"async\" src=\"https:\/\/lh7-rt.googleusercontent.com\/docsz\/AD_4nXczkD3S5J1ULufLDMiIOBnAmRy-R2vAhqk93sy9fo8eM0HnQGe_Y3YVScC7QEr_KaFp0GDvjVEMeIIMU9ZDsllhm5jYDjtUGNWNBUZUpTIfBC8NTdLYcTgN8sj1juB8GftlCxWb3A?key=2un548QBo9ib-u-CupaXhU6T\" alt=\"\" style=\"width:485px;height:auto\"\/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\">Figure 5: The propagation loss for the Gaussian mode input<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter is-resized\"><img decoding=\"async\" src=\"https:\/\/lh7-rt.googleusercontent.com\/docsz\/AD_4nXc0WIzuOx7_BzRibDnn130WSIT8A2KtmbR1JazWk7VxJon5VZ-OWL0hmEcAbXsEGj0xtHRkUOzaJrX0CrpV89D7c7fuwhBaZNHif95NMXDkjlz4JeEPMYBH8Y-I16F2HKfhLKsotA?key=2un548QBo9ib-u-CupaXhU6T\" alt=\"\" style=\"width:553px;height:auto\"\/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\">Figure 6: Output far field intensity and phase in paraxial approximtion<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/lh7-rt.googleusercontent.com\/docsz\/AD_4nXdFz7xLPQeA1BzWJOQNpyLTMCj10IdU2-OjK4_szueLsaVkhd6XYlPpUBnBVRAUkqv6sA9gQCk2JiF9vMy2jS5q7qyRcrmKQUwvK1JwM3Z5XTWAChh2h2rJLiFdXMjfGMzE8xUZ6g?key=2un548QBo9ib-u-CupaXhU6T\" alt=\"\"\/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\">Figure 7: Mode overlapping through the propagation<\/p>\n\n\n\n<p><span class=\"uppercase\">broadband ys system: specification<\/span><\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th><strong>Wavelength range (nm)<\/strong><\/th><th><strong>Fiber type<\/strong><\/th><th><strong>NA<\/strong><\/th><th><strong>Core size (um)<\/strong><\/th><th><strong>Cladding size (um)<\/strong><\/th><th><strong>Bend radius [mm]<\/strong><\/th><th><strong>Bend loss for 10 turns [dB]&nbsp;<\/strong><\/th><th><strong>Propagation loss<\/strong><\/th><\/tr><tr><th><strong>400-1000<\/strong><\/th><th><strong>MM mode<\/strong><\/th><th><strong>0.05<\/strong><\/th><th><strong>50~105<\/strong><\/th><th><strong>125~210<\/strong><\/th><th><strong>&lt;35<\/strong><\/th><th><strong>&lt;0.2<\/strong><\/th><th><strong>&lt;100dB\/km<\/strong><\/th><\/tr><\/thead><\/table><\/figure>\n\n\n\n<p class=\"has-text-align-center\">Table 6: Specification Table for the First Design for YS sensor<\/p>\n\n\n\n<p><span class=\"uppercase\"><span class=\"uppercase\">broadband ys system: material choosing<\/span><\/span><\/p>\n\n\n\n<p>We selected silicon dioxide (SiO\u2082) as the core material. The main reason is that its refractive index is stable, making it easier to use as the core. This also provides flexibility in selecting and doping other materials for the cladding in later design stages. The equation for NA as well as the one the below were used for calculating the appropriate refractive indices needed.<\/p>\n\n\n\n<figure class=\"wp-block-image is-resized\"><img decoding=\"async\" src=\"https:\/\/lh7-rt.googleusercontent.com\/slidesz\/AGV_vUc79te5-5d-w-owVnAwB3h7gA2gRp4j0_GZwFLS-T8vqSu_WvRX19vZq-_axPwXVwKPeG9e5sIBhDqCDJz_9QYs5OvyAkNg1GYLxC4aclxr-RV7v5o-0ZCjJSde5cz7QvRFl9uPzQ=s2048?key=iKtqmE-qgdSqWMHSGaIdPkTz\" alt=\"\" style=\"width:509px;height:auto\"\/><\/figure>\n\n\n\n<p><span class=\"uppercase\"><span class=\"uppercase\">Broadband ys system: tolerance for doping<\/span><\/span><\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th><strong>Trench doping<\/strong><\/th><th><strong>NA for = 400nm<\/strong><\/th><th><strong>Bend Loss (dB) for = 400nm<\/strong><\/th><\/tr><\/thead><tbody><tr><td>3.2% Wt&nbsp;<\/td><td>0.041326<\/td><td>1.747303e-06<\/td><\/tr><tr><td>3.3% Wt&nbsp;<\/td><td>0.039731<\/td><td>9.54328e-07<\/td><\/tr><tr><td>3.4% Wt&nbsp;<\/td><td>0.046580<\/td><td>6.818365e-07<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"has-text-align-center\">Table 7: The doping tolerance test for Trench material at 400 nm<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th class=\"has-text-align-left\" data-align=\"left\"><strong>Trench doping<\/strong><\/th><th><strong>NA for = 700nm<\/strong><\/th><th><strong>Bend Loss (dB) for = 700nm<\/strong><\/th><\/tr><\/thead><tbody><tr><td class=\"has-text-align-left\" data-align=\"left\">3.2% Wt&nbsp;<\/td><td>0.055065<\/td><td>0.0025423<\/td><\/tr><tr><td class=\"has-text-align-left\" data-align=\"left\">3.3% Wt&nbsp;<\/td><td>0.04070<\/td><td>0.0021732<\/td><\/tr><tr><td class=\"has-text-align-left\" data-align=\"left\">3.4% Wt&nbsp;<\/td><td>0.10740<\/td><td>0.0013191<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"has-text-align-center\">Table 8: The doping tolerance test for Trench material at 700 nm<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th><strong>Trench doping<\/strong><\/th><th><strong>NA for = 1000nm<\/strong><\/th><th><strong>Bend Loss (dB) for = 1000nm<\/strong><\/th><\/tr><\/thead><tbody><tr><td>3.2% Wt&nbsp;<\/td><td>0.059721&nbsp;<\/td><td>0.2523<\/td><\/tr><tr><td>3.3% Wt&nbsp;<\/td><td>0.041827<\/td><td>0.20601<\/td><\/tr><tr><td>3.4% Wt&nbsp;<\/td><td>0.139721<\/td><td>0.1701266<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"has-text-align-center\">Table 9: The doping tolerance test for Trench material at 1000 nm<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/lh7-rt.googleusercontent.com\/slidesz\/AGV_vUccAC7w8wv7Eh1_ZrsJVQevjTgM8JxWKnM5NfxONopP10kRSCCX-VGfsfrEVByQEsauDAP1t5IxVg00KLMnbxy6n7GAhKsnWUXhaTuGpsWB11MHTC4UZac5JNhL9WR21ZbOhg_zzmgTCl3LjkDmBfc=s2048?key=pyaGVs8jVsF042WQ97ztgQVW\" alt=\"\"\/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\">Table 10: The effect of doping in trench material on NA and Bend loss at 1000 nm<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th><strong>Cladding&nbsp; doping<\/strong><\/th><th class=\"has-text-align-left\" data-align=\"left\"><strong>Number of modes for&nbsp; = 1000nm<\/strong><\/th><th><strong>NA for = 1000nm<\/strong><\/th><th><strong>Bend Loss (dB) for = 1000nm<\/strong><\/th><\/tr><\/thead><tbody><tr><td>0.19% Wt (n=5.89e-4)<\/td><td class=\"has-text-align-left\" data-align=\"left\">8<\/td><td>0.04832<\/td><td>0.18943<\/td><\/tr><tr><td>0.18% Wt (n=5.58e-4)<\/td><td class=\"has-text-align-left\" data-align=\"left\">8<\/td><td>0.04831<\/td><td>0.18545<\/td><\/tr><tr><td>0.17% Wt (n=5.27e-4)<\/td><td class=\"has-text-align-left\" data-align=\"left\">8<\/td><td>0.04829<\/td><td>0.1874<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"has-text-align-center\">Table 11: The doping tolerance test for Cladding material at 1000 nm<\/p>\n\n\n\n<p><span class=\"uppercase\"><span class=\"uppercase\">Broadband ys system: Fiber Design<\/span><\/span><\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><td><\/td><td><strong>Material<\/strong><\/td><td><strong>Thickness (\u03bcm)<\/strong><\/td><td><strong>Refractive Index<\/strong><\/td><\/tr><tr><td><strong>Core<\/strong><\/td><td>Pure Silica Oxide<\/td><td>25 (radius)<\/td><td>1.4701 at 400 nm 1.4504 at 1000 nm<\/td><\/tr><tr><td><strong>Trench<\/strong><\/td><td>3.3% fluorine-doped SiO2<\/td><td>11<\/td><td>delta n=0.01023<\/td><\/tr><tr><td><strong>Cladding<\/strong><\/td><td>0.15% fluorine 0.38% chlorine- doped SiO2<\/td><td>N.A.<\/td><td>1.4696 at 400 nm 1.4502 at 1000 nm<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"has-text-align-center\">Table 12: Determined specifications for the 400-1000 nm fiber<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter is-resized\"><img decoding=\"async\" src=\"https:\/\/lh7-rt.googleusercontent.com\/slidesz\/AGV_vUfZqZQv8tw43aNGghoRQ_ykpp8puSX6iuLtvso5EwOpr8ossNIub04tHx0bMM-FwsWBdR_BzUZKBL_kHIk-wEwZlUH0M6uu-DtCWkcmivwzDDFnCIerDsYJQrcEnttHr4eOzsoe=s2048?key=iKtqmE-qgdSqWMHSGaIdPkTz\" alt=\"\" style=\"width:312px;height:auto\"\/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\">Figure 9: The cross-section of the designed trench fiber<\/p>\n\n\n\n<p><span class=\"uppercase\"><span class=\"uppercase\"><span class=\"uppercase\">Broadband ys system: simulation result<\/span><\/span><\/span><\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><td class=\"has-text-align-left\" data-align=\"left\"><strong>Wavelength (nm)<\/strong><\/td><td><strong>Mode number<\/strong><\/td><td><strong>NA<\/strong><\/td><td><strong>Bending Loss for 10 Turns (dB)<\/strong><\/td><\/tr><tr><td class=\"has-text-align-left\" data-align=\"left\">400<\/td><td>51 modes<\/td><td>0.042<\/td><td>0.206<\/td><\/tr><tr><td class=\"has-text-align-left\" data-align=\"left\">700<\/td><td>6 modes<\/td><td>0.041<\/td><td>0.002<\/td><\/tr><tr><td class=\"has-text-align-left\" data-align=\"left\">1000<\/td><td>3 modes<\/td><td>0.040<\/td><td>9.5e-7<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"has-text-align-center\">Table 13: Fiber design results<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/lh7-rt.googleusercontent.com\/docsz\/AD_4nXdDOmP96iwkP7B9Cwq0FDXLElgbDxg3y6viwCS_FPh0BUNANOYpMRQkEfzpwRappnMBpnzoZtSOKP74TcmKRIwwfrXonb7lj1uVw94WX7S4UN8iMRpcw3zesiJnEDh8w53THpUp7w?key=2un548QBo9ib-u-CupaXhU6T\" alt=\"\"\/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\">Figure 10: The cross-section of the designed trench fiber (top left), the propagation loss for the Gaussian mode input (top right), the output far field intensity (bottom left), and the phase in paraxial approximtion (bottom right) for 1000 nm.<\/p>\n\n\n\n<figure class=\"wp-block-image is-resized\"><img decoding=\"async\" src=\"https:\/\/lh7-rt.googleusercontent.com\/docsz\/AD_4nXfXcLjqEU5hnxS1YmrtDEvLgezJ6z-ikxZm_PE_QPst45ErgnjD98bdhf_mYaKo0718i3kHB7Lb6IW0ipQi9YFeFujb36LPIBZJ3Esd4Sh5AILyx6bTma0gkH6y2wQ22JruL-v9CQ?key=2un548QBo9ib-u-CupaXhU6T\" alt=\"\" style=\"width:840px;height:auto\"\/><\/figure>\n\n\n\n<p class=\"has-text-align-center\">Figure 11: Mode overlapping through the propagation for 1000 nm.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>The low numerical aperture multimode fiber project is a detailed fiber design and simulation developed by a team of undergraduate senior students. As such, the inputs were determined through discussion with our project customer, ASML. We are designing a fiber to support ASML\u2019s YieldStar (YS) optics sensor for scanning wafers using white light with the wavelength range of 400 to 1000 nm and another fiber to operate at a wavelength of 1070 nm meant to preheat a mirror for a separate lithography machine.<\/p>\n","protected":false},"author":17842,"featured_media":214162,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_coblocks_attr":"","_coblocks_dimensions":"","_coblocks_responsive_height":"","_coblocks_accordion_ie_support":"","_monsterinsights_skip_tracking":false,"_monsterinsights_sitenote_active":false,"_monsterinsights_sitenote_note":"","_monsterinsights_sitenote_category":0,"footnotes":""},"categories":[4442,2936,136,2976,3096],"tags":[],"coauthors":[22412,22422,22442],"class_list":["post-187672","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-archive","category-keywords-archive","category-opt-ope-archive","category-optical-archive","category-simulation-archive"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.5 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>ASML FIBER - Senior Design Day<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-fiber\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"ASML FIBER - Senior Design Day\" \/>\n<meta property=\"og:description\" content=\"The low numerical aperture multimode fiber project is a detailed fiber design and simulation developed by a team of undergraduate senior students. 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