{"id":216002,"date":"2026-05-04T11:44:09","date_gmt":"2026-05-04T15:44:09","guid":{"rendered":"https:\/\/www.hajim.rochester.edu\/senior-design-day\/?p=216002"},"modified":"2026-05-04T11:44:09","modified_gmt":"2026-05-04T15:44:09","slug":"asml-precision-air-bearing-testing-rig","status":"publish","type":"post","link":"https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-precision-air-bearing-testing-rig\/","title":{"rendered":"ASML-Precision Air Bearing Testing Rig"},"content":{"rendered":"\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/04\/Image-6-1.jpeg\" alt=\"\" class=\"wp-image-234782\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/04\/Image-6-1.jpeg 1024w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/04\/Image-6-1-300x225.jpeg 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/04\/Image-6-1-768x576.jpeg 768w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n<div class=\"wp-block-group\">\u00a0<\/div>\n<header>\n<p>ME 204- Mechanical Engineering Senior Design<\/p>\n<\/header>\n<h3><span style=\"color: #283faf;\"><strong>Team Members<\/strong><\/span><\/h3>\n<p style=\"text-align: left;\">Kaan Aytekin, Michael Bartusek, Darren Chen, \u200b Amel Rouabhia, Ryan Zorzi<\/p>\n<h3><span style=\"color: #283faf;\">Problem Overview<\/span><\/h3>\n<nav>\n<p>Linear motion air bearings use a thin cushion of pressurized air to enable precise, near-frictionless motion between two surfaces. ASML utilizes custom air bearings in its chip production machines, specifically in the Retical stage, to achieve the high-precision motion necessary for semiconductor manufacturing.<\/p>\n<p><div class=\"wp-embed\"><div class=\"wp-embed-wrap\"><iframe loading=\"lazy\" title=\"The reticle and reticle stage - Inside the TWINSCAN NXE:3400 EUV lithography machine | ASML\" width=\"1062\" height=\"597\" src=\"https:\/\/www.youtube.com\/embed\/BM9cAWaRi3Q?start=1&#038;feature=oembed\" frameborder=\"0\" allow=\"accelerometer; autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture; web-share\" referrerpolicy=\"strict-origin-when-cross-origin\" allowfullscreen><\/iframe><\/div><\/div><\/p>\n<p>In an effort to reduce costs, ASML is investigating the feasibility of using commercially available air bearings as suitable replacements for its current custom air bearings. The primary objective of our capstone project is to identify a list of commercial candidates that meet ASML&#8217;s strict specifications, develop a custom testing rig to measure bearing load capacity and the resulting change in the flyheight, and perform testing on those airbearings that meet the requirements.<\/p>\n<h3><strong><span style=\"color: #283faf;\">Project Goal<\/span><\/strong><\/h3>\n<p><span style=\"font-size: revert; color: initial; font-family: -apple-system, BlinkMacSystemFont, 'Segoe UI', Roboto, Oxygen-Sans, Ubuntu, Cantarell, 'Helvetica Neue', sans-serif;\">The objective of this project is to design a high-precision testing rig capable of measuring air bearing performance metrics, specifically load versus flyheight. To ensure measurement integrity, the rig&#8217;s structure must maintain a micron-level flatness tolerance across the primary support surface( Granite surface). The central goal is to produce load-versus-fly-height performance diagrams for 60, 80, and 100 psi, with 100 psi representing the specific operating pressure used in ASML\u2019s machines.<\/span><\/p>\n<\/nav>\n<section id=\"problem\">\n<h3><strong style=\"font-family: proxima-nova, 'Helvetica Neue', sans-serif; font-size: 1.5rem; letter-spacing: -0.03125rem;\"><span style=\"color: #283faf;\">Design <\/span><\/strong><\/h3>\n<\/section>\n<p>After multiple design concepts and iterations, the team developed a bottom-loading apparatus that applies a downward force below the air bearing&#8217;s center of mass. This configuration features a &#8220;self-centering&#8221; mechanism, which ensures that the applied force remains directly below the bearing and entirely vertical during measurement. The testing rig is integrated into five main subsystems:<\/p>\n<ol>\n<li>Load Application System: A self-aligning mechanism utilizing tensioned springs to apply vertical forces.<\/li>\n<li>Displacement Measurement Mount: A bridge-style structure designed to hold high-precision Keyence sensors.<\/li>\n<li>Support Frame: A rigid assembly holding a precision-ground granite surface plate as the primary datum.<\/li>\n<li>Air Supply Components: A regulated pneumatic system for delivering and monitoring airflow.<\/li>\n<li>Safety Features: Structural limits and guards to protect the high-precision components and operators during testing.<\/li>\n<\/ol>\n<div id='gallery-1' class='gallery galleryid-216002 gallery-columns-5 gallery-size-thumbnail'><figure class='gallery-item'>\n\t\t\t<div class='gallery-icon portrait'>\n\t\t\t\t<a href='https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-precision-air-bearing-testing-rig\/image-14-13\/'><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/Image-14-150x150.jpeg\" class=\"attachment-thumbnail size-thumbnail\" alt=\"\" aria-describedby=\"gallery-1-236142\" \/><\/a>\n\t\t\t<\/div>\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-236142'>\n\t\t\t\tFully Assemble System\n\t\t\t\t<\/figcaption><\/figure><figure class='gallery-item'>\n\t\t\t<div class='gallery-icon portrait'>\n\t\t\t\t<a href='https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-precision-air-bearing-testing-rig\/image-10-23\/'><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/Image-10-1-150x150.jpeg\" class=\"attachment-thumbnail size-thumbnail\" alt=\"\" aria-describedby=\"gallery-1-236182\" \/><\/a>\n\t\t\t<\/div>\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-236182'>\n\t\t\t\t80\/20 Support Table\n\t\t\t\t<\/figcaption><\/figure><figure class='gallery-item'>\n\t\t\t<div class='gallery-icon landscape'>\n\t\t\t\t<a href='https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-precision-air-bearing-testing-rig\/image-17-11\/'><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/Image-17-150x150.jpeg\" class=\"attachment-thumbnail size-thumbnail\" alt=\"\" aria-describedby=\"gallery-1-236262\" \/><\/a>\n\t\t\t<\/div>\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-236262'>\n\t\t\t\tLoading Bars\n\t\t\t\t<\/figcaption><\/figure><figure class='gallery-item'>\n\t\t\t<div class='gallery-icon portrait'>\n\t\t\t\t<a href='https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-precision-air-bearing-testing-rig\/image-16-12\/'><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/Image-16-150x150.jpeg\" class=\"attachment-thumbnail size-thumbnail\" alt=\"\" aria-describedby=\"gallery-1-236272\" \/><\/a>\n\t\t\t<\/div>\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-236272'>\n\t\t\t\tBottom Loading Components\n\t\t\t\t<\/figcaption><\/figure><figure class='gallery-item'>\n\t\t\t<div class='gallery-icon portrait'>\n\t\t\t\t<a href='https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-precision-air-bearing-testing-rig\/image-15-13\/'><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/Image-15-150x150.jpeg\" class=\"attachment-thumbnail size-thumbnail\" alt=\"\" aria-describedby=\"gallery-1-236282\" \/><\/a>\n\t\t\t<\/div>\n\t\t\t\t<figcaption class='wp-caption-text gallery-caption' id='gallery-1-236282'>\n\t\t\t\tDisplacement Mount\n\t\t\t\t<\/figcaption><\/figure>\n\t\t<\/div>\n\n<p><span style=\"color: #283faf; font-family: proxima-nova, 'Helvetica Neue', sans-serif; font-size: 2.5rem; font-weight: bold; letter-spacing: -0.046875rem;\">Manufacturing &amp; Materials<\/span><\/p>\n<section id=\"manufacturing\">The manufacturing strategy prioritized structural rigidity and micron-level precision.\n<ul>\n<li>For the load application subsystem, steel was selected for the loading bars and hex tensioning mechanism to provide high stability and facilitate a reliable preload. This subsystem required 27 hours of milling, turning, and sawing.<\/li>\n<li>The displacement mount was fabricated from aluminum over 20 hours of mill time, chosen for its light weight and ease of producing the precise tapped holes required for sensor integration.<\/li>\n<li>To establish a reliable measurement datum, the displacement flag was manufactured from a 0.5-inch steel plate ground to a 2.5-micron flatness, as thinner stock proved susceptible to warping.<\/li>\n<li>Finally, the granite support table was constructed using 1.5-inch 80\/20 aluminum extrusion, with the ends precision-milled to ensure flat mating surfaces for the granite slab.<\/li>\n<\/ul>\n<p><span style=\"color: #283faf; font-family: proxima-nova, 'Helvetica Neue', sans-serif; font-size: 2.5rem; font-weight: bold; letter-spacing: -0.046875rem;\">Experimental Validation<\/span><\/p>\n<p>Experimental validation focused on systematic data acquisition and the elimination of measurement bias through a rigorous calibration protocol.\u00a0During testing, air was supplied at regulated pressures, and mechanical loads were added incrementally using the hex tensioning tool in roughly 35 lb steps. To maintain data integrity, the system was fully unloaded, and sensors were re-zeroed between every measurement. The resulting data were processed in MATLAB, leveraging the geometric principle that three points define a plane to identify the exact center of the air bearing.<\/p>\n<p><span data-contrast=\"auto\">\u00a0The center fly heights were plotted against the applied loads\u00a0for 60, 80, and 100 psi of air pressure in the figures below<\/span><span data-contrast=\"auto\">. In terms of fly height measurement, the bottleneck in the uncertainty was the flatness of the flag. The overall flatness of the flag was on the order of 5 microns as measured by a dial gauge on a surface plate.\u00a0Locally,\u00a0that is\u00a0within a\u00a0\u00be inch radius around where the\u00a0displacement sensors read,\u00a0the flatness was around 2 microns.\u00a0The remainder of the\u00a0sensor uncertainty\u00a0was\u00a0combined with the flag flatness by\u00a0RSS.<\/span><span data-ccp-props=\"{&quot;201341983&quot;:0,&quot;335551550&quot;:6,&quot;335551620&quot;:6,&quot;335559731&quot;:720,&quot;335559740&quot;:259}\"> \u00a0<\/span><span data-contrast=\"auto\">For the 60 and 80 psi case, the manufacturer has published load vs. flyheight data, which are plotted along with our results.\u00a0<\/span><span data-ccp-props=\"{&quot;201341983&quot;:0,&quot;335551550&quot;:1,&quot;335551620&quot;:1,&quot;335559731&quot;:720,&quot;335559740&quot;:259}\">\u00a0<\/span><\/p>\n<\/section>\n<div id='gallery-2' class='gallery galleryid-216002 gallery-columns-3 gallery-size-full'><figure class='gallery-item'>\n\t\t\t<div class='gallery-icon landscape'>\n\t\t\t\t<a href='https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-precision-air-bearing-testing-rig\/load_vs_flyheight_60psi-1\/'><img loading=\"lazy\" decoding=\"async\" width=\"1761\" height=\"1161\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_60psi-1.jpg\" class=\"attachment-full size-full\" alt=\"\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_60psi-1.jpg 1761w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_60psi-1-300x198.jpg 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_60psi-1-1024x675.jpg 1024w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_60psi-1-768x506.jpg 768w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_60psi-1-1536x1013.jpg 1536w\" sizes=\"auto, (max-width: 1761px) 100vw, 1761px\" \/><\/a>\n\t\t\t<\/div><\/figure><figure class='gallery-item'>\n\t\t\t<div class='gallery-icon landscape'>\n\t\t\t\t<a href='https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-precision-air-bearing-testing-rig\/load_vs_flyheight_80psi-1\/'><img loading=\"lazy\" decoding=\"async\" width=\"1761\" height=\"1161\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_80psi-1.jpg\" class=\"attachment-full size-full\" alt=\"\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_80psi-1.jpg 1761w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_80psi-1-300x198.jpg 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_80psi-1-1024x675.jpg 1024w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_80psi-1-768x506.jpg 768w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_80psi-1-1536x1013.jpg 1536w\" sizes=\"auto, (max-width: 1761px) 100vw, 1761px\" \/><\/a>\n\t\t\t<\/div><\/figure><figure class='gallery-item'>\n\t\t\t<div class='gallery-icon landscape'>\n\t\t\t\t<a href='https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-precision-air-bearing-testing-rig\/load_vs_flyheight_100psi-1\/'><img loading=\"lazy\" decoding=\"async\" width=\"1761\" height=\"1161\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_100psi-1.jpg\" class=\"attachment-full size-full\" alt=\"\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_100psi-1.jpg 1761w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_100psi-1-300x198.jpg 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_100psi-1-1024x675.jpg 1024w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_100psi-1-768x506.jpg 768w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/load_vs_flyheight_100psi-1-1536x1013.jpg 1536w\" sizes=\"auto, (max-width: 1761px) 100vw, 1761px\" \/><\/a>\n\t\t\t<\/div><\/figure>\n\t\t<\/div>\n\n<header><\/header><nav><\/nav>\n<section id=\"manufacturing\"><\/section>\n\n\n<p><\/p>\n\n\n\n<p><strong>\u00a0Acknowledgments\u00a0<\/strong><\/p>\n\n\n\n<p>We would like to thank our sponsor Ognjen\u00a0Bosic\u00a0for his guidance on this project, ASML,\u00a0for accommodating our tour of their\u00a0facility\u00a0and sponsoring this project,\u00a0and\u00a0the\u00a0Department of Mechanical Engineering for sponsoring our trip to ASML and funding this project. We would also like to thank\u00a0Professor Muir for his invaluable technical advice, Christine Pratt\u00a0for assisting\u00a0the team\u00a0with the Keyence sensor operation\u00a0and air flow consulting, Professor Mohammad for his time assisting with our load cell circuitry, Bill Mildenberger\u00a0for manufacturing the flag and assisting with machining operations, Sam Kriegsman for an\u00a0incredible amount of machining advice,\u00a0Jim Alkins for assistance in the\u00a0Rettner\u00a0machine shop,\u00a0Ed Herger for\u00a0advising us on displacement measuring techniques,\u00a0Mason\u00a0Garlatti\u00a0and the Chemical Engineering Department for lending us the regulator and assisting with the\u00a0air supply\u00a0tubing, Arthur Chen with assistance during setup,\u00a0and\u00a0our TA Matthew Hook for\u00a0helping us in our biweekly meetings.\u00a0<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u00a0 ME 204- Mechanical Engineering Senior Design Team Members Kaan Aytekin, Michael Bartusek, Darren Chen, \u200b Amel Rouabhia, Ryan Zorzi Problem Overview Linear motion air bearings use a thin cushion&hellip;<\/p>\n","protected":false},"author":18972,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_coblocks_attr":"","_coblocks_dimensions":"","_coblocks_responsive_height":"","_coblocks_accordion_ie_support":"","_monsterinsights_skip_tracking":false,"_monsterinsights_sitenote_active":false,"_monsterinsights_sitenote_note":"","_monsterinsights_sitenote_category":0,"footnotes":""},"categories":[4452,4572],"tags":[],"coauthors":[24052,24062,24072,24082,24092],"class_list":["post-216002","post","type-post","status-publish","format-standard","hentry","category-current-year","category-me"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.5 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>ASML-Precision Air Bearing Testing Rig - Senior Design Day<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-precision-air-bearing-testing-rig\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"ASML-Precision Air Bearing Testing Rig - Senior Design Day\" \/>\n<meta property=\"og:description\" content=\"\u00a0 ME 204- Mechanical Engineering Senior Design Team Members Kaan Aytekin, Michael Bartusek, Darren Chen, \u200b Amel Rouabhia, Ryan Zorzi Problem Overview Linear motion air bearings use a thin cushion&hellip;\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/asml-precision-air-bearing-testing-rig\/\" \/>\n<meta property=\"og:site_name\" content=\"Senior Design Day\" \/>\n<meta property=\"article:published_time\" content=\"2026-05-04T15:44:09+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2026\/05\/Image-14-150x150.jpeg\" \/>\n<meta name=\"author\" content=\"Kaan Aytekin, Michael Bartusek, Darren Chen, Amel Rouabhia, Ryan Zorzi\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"Kaan Aytekin, Michael Bartusek, Darren Chen, Amel Rouabhia, Ryan Zorzi\" \/>\n\t<meta name=\"twitter:label2\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"4 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\\\/\\\/www.hajim.rochester.edu\\\/senior-design-day\\\/asml-precision-air-bearing-testing-rig\\\/#article\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/www.hajim.rochester.edu\\\/senior-design-day\\\/asml-precision-air-bearing-testing-rig\\\/\"},\"author\":{\"name\":\"Kaan Aytekin\",\"@id\":\"https:\\\/\\\/www.hajim.rochester.edu\\\/senior-design-day\\\/#\\\/schema\\\/person\\\/a0c30abcba2c11faaf17d44d24235e7b\"},\"headline\":\"ASML-Precision Air Bearing Testing Rig\",\"datePublished\":\"2026-05-04T15:44:09+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\\\/\\\/www.hajim.rochester.edu\\\/senior-design-day\\\/asml-precision-air-bearing-testing-rig\\\/\"},\"wordCount\":838,\"image\":{\"@id\":\"https:\\\/\\\/www.hajim.rochester.edu\\\/senior-design-day\\\/asml-precision-air-bearing-testing-rig\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/www.hajim.rochester.edu\\\/senior-design-day\\\/wp-content\\\/uploads\\\/2026\\\/04\\\/Image-6-1.jpeg\",\"articleSection\":[\"1. 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