{"id":69742,"date":"2022-03-01T10:56:51","date_gmt":"2022-03-01T14:56:51","guid":{"rendered":"https:\/\/seniordesign.digitalscholar.rochester.edu\/spring2022\/uncategorized\/nanoar\/"},"modified":"2022-09-13T12:26:10","modified_gmt":"2022-09-13T16:26:10","slug":"nanoar","status":"publish","type":"post","link":"https:\/\/www.hajim.rochester.edu\/senior-design-day\/nanoar\/","title":{"rendered":"NANOAR"},"content":{"rendered":"\n<h2 class=\"wp-block-heading\">Team<\/h2>\n\n\n\n<ul class=\"is-style-default wp-block-list\"><li>Sirui Tang<\/li><li>Yi Wang<\/li><li>Yuning Xia<\/li><li>Jingkai Ye<\/li><\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">Mentor<\/h2>\n\n\n\n<ul class=\"wp-block-list\"><li>Parag Kelkar (ASML Customer)<\/li><li>Jennifer Kruschwitz (Faculty Advisor)<\/li><\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">Abstract<\/h2>\n\n\n\n<p>The desired product is a thin-film model used to predict the index profile and simulate the optical performance of plasma-etched nanostructure AR coatings. Our goal is to develop thin-film coating models using OptiLayer, OptiChar, and OptiRE based on observed microscopic geometrical structures of each sample surface and strive to closely match measured performance data from ellipsometer and spectrophotometer. We then aim to use the fitted thin-film models to investigate how parameter change in the etching process affects the index profile and performance of the manufactured samples.&nbsp;<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Introduction<\/h2>\n\n\n\n<p>Nanostructure coating is a new kind of coating without actually coating any materials on the glass surface. Instead, it removes material from the glass surface to create nanostructures. By mixing substrate material and air under nano-scale, it creates the same effect as different indices. Compared with traditional thin-film coatings, nanostructure coatings can work for a wider bandwidth from UV to IR.<\/p>\n\n\n\n<div class=\"wp-block-image\"><figure class=\"aligncenter size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"348\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Introduction-1024x348.png\" alt=\"\" class=\"wp-image-108152\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Introduction-1024x348.png 1024w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Introduction-300x102.png 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Introduction-768x261.png 768w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Introduction-1536x522.png 1536w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Introduction-2048x696.png 2048w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Introduction-1200x408.png 1200w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Introduction-1980x673.png 1980w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><figcaption><strong>Figure 1<\/strong>. (Left) Illustration of etching process; (Right) Comparison between the performance of traditional thin-film coating and nanostructure coating <sup>[1]<\/sup>.<\/figcaption><\/figure><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Background<\/h2>\n\n\n\n<p>Nanostructure coating produced from the etching process has a periodic subwavelength pattern. When light interacts with these structures, it will not diffract as if it interacts with a diffraction grating. Instead, it will reflect and transmit as if it encounters a medium<sup> [2]<\/sup>. Effective medium approximations (EMA) could be applied to describe these phenomena. In general, the optical properties of the effective medium are like the weighted spatial average of the profile region&#8217;s optical properties<sup> [2]<\/sup>. Figure 2 below shows two examples of nanostructure profile shapes and their effective medium approximation. For a multi-level surface relief profile (Figure 2.a), the effective medium is a film stack where each layer of the film stack corresponds to a distinct level of the surface-relief profile. For a continuous profile (Figure 2.b), the effective medium is a gradient film.<\/p>\n\n\n\n<div class=\"wp-block-image is-style-default\"><figure class=\"aligncenter size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/03\/Picture1.png\" alt=\"\" class=\"wp-image-1562\" width=\"551\" height=\"346\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/03\/Picture1.png 936w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/03\/Picture1-300x188.png 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/03\/Picture1-768x482.png 768w\" sizes=\"auto, (max-width: 551px) 100vw, 551px\" \/><figcaption><strong>Figure 2<\/strong>. Effective medium approximation for a nanostructure coating as (a) a thin film stack or (b) a gradient index film <sup>[2]<\/sup>.<\/figcaption><\/figure><\/div>\n\n\n\n<p>In this project, we use SEM to observe the profile of the sample. With the geometric structure of the profile, we can determine its effect medium approximation, which helps to establish the starting point of our thin-film model. The starting point is a combination of film stacks and gradient films based on the structure we observe. The index of air and the substrate is known, so the index for the mid-layers can be fitted by each sample\u2019s optical performance, such as the ellipsometry and spectrophotometry data.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Measurements<\/h2>\n\n\n\n<div class=\"wp-block-media-text alignwide is-stacked-on-mobile is-style-default\" style=\"grid-template-columns:72% auto\"><figure class=\"wp-block-media-text__media\"><img loading=\"lazy\" decoding=\"async\" width=\"927\" height=\"350\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/SEM.png\" alt=\"\" class=\"wp-image-108172 size-full\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/SEM.png 927w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/SEM-300x113.png 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/SEM-768x290.png 768w\" sizes=\"auto, (max-width: 927px) 100vw, 927px\" \/><\/figure><div class=\"wp-block-media-text__content\">\n<p class=\"has-large-font-size\" style=\"font-size:25px\">SEM pictures of the cross-section profile of the samples.<\/p>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-media-text alignwide is-stacked-on-mobile\" style=\"grid-template-columns:72% auto\"><figure class=\"wp-block-media-text__media\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"441\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Reflectance-1024x441.png\" alt=\"\" class=\"wp-image-108182 size-full\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Reflectance-1024x441.png 1024w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Reflectance-300x129.png 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Reflectance-768x331.png 768w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Reflectance.png 1080w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure><div class=\"wp-block-media-text__content\">\n<p class=\"has-large-font-size\" style=\"font-size:25px\">Reflectance measured at an incident angle of 8\u00b0 for average polarization.<\/p>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-media-text alignwide is-stacked-on-mobile\" style=\"grid-template-columns:72% auto\"><figure class=\"wp-block-media-text__media\"><img loading=\"lazy\" decoding=\"async\" width=\"846\" height=\"284\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Ellipsometry.png\" alt=\"\" class=\"wp-image-108232 size-full\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Ellipsometry.png 846w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Ellipsometry-300x101.png 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Ellipsometry-768x258.png 768w\" sizes=\"auto, (max-width: 846px) 100vw, 846px\" \/><\/figure><div class=\"wp-block-media-text__content\">\n<p class=\"has-large-font-size\" style=\"font-size:25px\">Ellipsometry data measured at incident angles from 45\u00b0 to 75\u00b0.<\/p>\n<\/div><\/div>\n\n\n\n<div class=\"wp-block-coblocks-accordion\">\n<div class=\"wp-block-coblocks-accordion-item\"><\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Modeling<\/h2>\n\n\n\n<p>By looking at the SEM pictures that show the geometrical shape of the nanostructures on the sample surfaces, we can build either single-layer or multi-layer models with both mixture material and inhomogeneous materials. This process involves a lot of trial and error because from the side profile pictures, we have many options as to how to divide the layers up and whether inhomogeneity is needed or not for each.&nbsp;<\/p>\n\n\n\n<p>For example, the following sample (T0013) has a clear side profile from the SEM. We can estimate the shape as two trapezoids on top and two rectangles on the bottom. In this way, the roughly estimated index profile based on the structure is shown in Figure 3. <\/p>\n\n\n\n<div class=\"wp-block-image\"><figure class=\"aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"781\" height=\"405\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Layer-Thickness.png\" alt=\"\" class=\"wp-image-81472\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Layer-Thickness.png 781w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Layer-Thickness-300x156.png 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Layer-Thickness-768x398.png 768w\" sizes=\"auto, (max-width: 781px) 100vw, 781px\" \/><figcaption><strong>Figure 3<\/strong>. SEM image of the cross-section of sample T10013 with its approximate geometric model.<\/figcaption><\/figure><\/div>\n\n\n\n<p>As shown, the model we have for this sample has four layers, where the bottom two are made of mixed materials of the substrate and air, which have fixed indices. The top two layers are also made of mixed materials but with inhomogeneity applied because their structures are not uniform as the physical thickness increases. The layers that have inhomogeneity have increasing or decreasing indices that start from where the layer before it ends, and end at where the layer after it starts.&nbsp;The fitted reflectance data at different incidence angles and the index profile of the model are shown in Figure 4.<\/p>\n\n\n\n<div class=\"wp-block-image\"><figure class=\"aligncenter size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"793\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Modeling2-1024x793.png\" alt=\"\" class=\"wp-image-108162\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Modeling2-1024x793.png 1024w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Modeling2-300x232.png 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Modeling2-768x595.png 768w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Modeling2-1536x1190.png 1536w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Modeling2-2048x1587.png 2048w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Modeling2-1200x930.png 1200w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/Modeling2-1980x1534.png 1980w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><figcaption><strong>Figure 4.<\/strong> (Lower) Index profile of the fitted four-layer model with inhomogeneity for sample T0013; (Upper) Reflectance curve of the fitted model of sample T0013 compared with measured data.<\/figcaption><\/figure><\/div>\n\n\n\n<p>The models for all the samples are folded below. Generally, for the under-etched samples, we focus on simulating reflectance, ellipsometric data, and etched thickness using single-layer models. For the well-etched samples, we focus on simulating the cross-section structure and reflectance data using multi-layer models with inhomogeneities.<\/p>\n\n\n\n<div class=\"wp-block-coblocks-accordion\">\n<div class=\"wp-block-coblocks-accordion-item\"><details><summary class=\"wp-block-coblocks-accordion-item__title\">Layer model for <strong>Sample T0008<\/strong><\/summary><div class=\"wp-block-coblocks-accordion-item__content\">\n<p>The final fitting result for sample T0008 is a two-layer model.<\/p>\n\n\n\n<ul class=\"wp-block-list\"><li>First&nbsp;layer: a mixture of&nbsp;75% of substrate&nbsp;glass&nbsp;and&nbsp;25% of air. Thickness of 56.173nm.<\/li><li>Second layer: a mixture of 53.09% of substrate glass and&nbsp;46.91% of air. Thickness of 75.269nm.<\/li><\/ul>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"914\" height=\"1024\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.34.44-914x1024.png\" alt=\"\" class=\"wp-image-81652\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.34.44-914x1024.png 914w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.34.44-268x300.png 268w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.34.44-768x860.png 768w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.34.44.png 1102w\" sizes=\"auto, (max-width: 914px) 100vw, 914px\" \/><\/figure>\n<\/div><\/details><\/div>\n\n\n\n<div class=\"wp-block-coblocks-accordion-item\"><details><summary class=\"wp-block-coblocks-accordion-item__title\">Layer model for <strong>Sample T0009<\/strong><\/summary><div class=\"wp-block-coblocks-accordion-item__content\">\n<p>The final fitting result for sample T0009 is a four-layer model with inhomogeneities.<\/p>\n\n\n\n<ul class=\"wp-block-list\"><li>First layer:&nbsp;a mixture of&nbsp;40% substrate&nbsp;glass and 60% of air. Inhomogeneity of -6%.&nbsp;Thickness of 137.679nm.<\/li><li>Second layer:&nbsp;a mixture of&nbsp;30% substrate glass and 70% of air. No inhomogeneity. Thickness of 27.413nm.<\/li><li>Third layer:&nbsp;a mixture of&nbsp;40% substrate glass and 60% of air.&nbsp;Inhomogeneity&nbsp;of 6.5%. Thickness of 30nm.<\/li><li>Fourth layer:&nbsp;a mixture of&nbsp;30% substrate glass and 70% of air. Inhomogeneity of -15%. Thickness of 17nm.<\/li><\/ul>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"694\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/T0009-4-1024x694.png\" alt=\"\" class=\"wp-image-108262\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/T0009-4-1024x694.png 1024w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/T0009-4-300x203.png 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/T0009-4-768x520.png 768w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/T0009-4.png 1125w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n<\/div><\/details><\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-coblocks-accordion\">\n<div class=\"wp-block-coblocks-accordion-item\"><details><summary class=\"wp-block-coblocks-accordion-item__title\">Layer model for <strong>Sample T0010<\/strong><\/summary><div class=\"wp-block-coblocks-accordion-item__content\">\n<p>The final fitting result for sample T0010 is a single-layer model, which is a mixture of 50.81% of substrate glass and 49.19% of air with a thickness of 41.319nm.<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"923\" height=\"1024\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.40.46-923x1024.png\" alt=\"\" class=\"wp-image-81692\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.40.46-923x1024.png 923w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.40.46-270x300.png 270w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.40.46-768x852.png 768w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.40.46.png 1098w\" sizes=\"auto, (max-width: 923px) 100vw, 923px\" \/><\/figure>\n<\/div><\/details><\/div>\n\n\n\n<div class=\"wp-block-coblocks-accordion-item\"><details><summary class=\"wp-block-coblocks-accordion-item__title\">Layer model for <strong>Sample T0011<\/strong><\/summary><div class=\"wp-block-coblocks-accordion-item__content\">\n<p>The final fitting result for sample T0011 is a single-layer model, which is a mixture of 50% of substrate glass and 50% of air with a thickness of 64.112nm.<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"883\" height=\"1024\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.41.29-883x1024.png\" alt=\"\" class=\"wp-image-81712\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.41.29-883x1024.png 883w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.41.29-259x300.png 259w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.41.29-768x890.png 768w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/04\/Screen-Shot-2022-04-26-at-22.41.29.png 1068w\" sizes=\"auto, (max-width: 883px) 100vw, 883px\" \/><\/figure>\n<\/div><\/details><\/div>\n\n\n\n<div class=\"wp-block-coblocks-accordion-item\"><details><summary class=\"wp-block-coblocks-accordion-item__title\">Layer model for <strong>Sample T0013<\/strong><\/summary><div class=\"wp-block-coblocks-accordion-item__content\">\n<p>The final fitting result for sample T0013 is a four-layer model with inhomogeneities.<\/p>\n\n\n\n<ul class=\"wp-block-list\"><li>First layer:&nbsp;a mixture of&nbsp;50% substrate&nbsp;glass and 50% of air. No inhomogeneity.&nbsp;Thickness of 77nm.<\/li><li>Second layer:&nbsp;a mixture of&nbsp;35% substrate glass and 65% of air. No inhomogeneity. Thickness of 68.891nm.<\/li><li>Third layer:&nbsp;a mixture of&nbsp;40% substrate glass and 60% of air.&nbsp;Inhomogeneity&nbsp;of 4%. Thickness of 63nm.<\/li><li>Fourth layer:&nbsp;a mixture of&nbsp;30% substrate glass and 70% of air. Inhomogeneity of -12%. Thickness of 18nm.<\/li><\/ul>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"717\" src=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/T0013-1-1024x717.png\" alt=\"\" class=\"wp-image-108272\" srcset=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/T0013-1-1024x717.png 1024w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/T0013-1-300x210.png 300w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/T0013-1-768x538.png 768w, https:\/\/www.hajim.rochester.edu\/senior-design-day\/wp-content\/uploads\/2022\/05\/T0013-1.png 1134w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n<\/div><\/details><\/div>\n<\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Conclusion and Acknowledgment<\/h2>\n\n\n\n<p>We have developed multi-layer thin-film coating models that both carefully reflect the geometry of the nanostructure and closely simulate the sample&#8217;s coating performance. We expect the models to help ASML to investigate how parameter change in the etching process affects the index profile and the optical performance of the manufactured samples, and therefore improve the technique.<\/p>\n\n\n\n<p>We greatly appreciate the technical advice from Prof. Jennifer Kruschwitz and the support from Prof. Brian McIntyre (URnano), Dr. Amy Rigatti (LLE), Ni Huo (Chemistry Department),&nbsp;and Prof. Wayne Knox.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">References<\/h2>\n\n\n\n[1] Parag Kelkar. &#8220;Nanostructure Anti-reflection Coating Characterization,&#8221; lecture notes, (2021).<\/p>\n\n\n\n[2] Daniel H. Raguin and G. Michael Morris, &#8220;Antireflection structured surfaces for the infrared spectral region,&#8221; Appl. Opt.&nbsp;32, 1154-1167 (1993).<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Have you heard of an AR coating without actually coating any materials while working for a wide bandwidth from UV to IR? That is the nanostructure coating.<\/p>\n","protected":false},"author":6242,"featured_media":108352,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_coblocks_attr":"","_coblocks_dimensions":"","_coblocks_responsive_height":"","_coblocks_accordion_ie_support":"","_monsterinsights_skip_tracking":false,"_monsterinsights_sitenote_active":false,"_monsterinsights_sitenote_note":"","_monsterinsights_sitenote_category":0,"footnotes":""},"categories":[136,2976],"tags":[],"coauthors":[8612],"class_list":["post-69742","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-opt-ope-archive","category-optical-archive"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.5 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>NANOAR - Senior Design Day<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.hajim.rochester.edu\/senior-design-day\/nanoar\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"NANOAR - Senior Design Day\" \/>\n<meta property=\"og:description\" content=\"Have you heard of an AR coating without actually coating any materials while working for a wide bandwidth from UV to IR? 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