Team Members
Sara Apanavicius
Fatou Diop
Koushul Ramjattum
Hongzhi Zeng
Supervisors
Clair Cunningham, F. Doug Kelley, Chemical Engineering
Customers
Wyatt Tenhaeff, Professor, Chemical Engineering
Description
The goal of the project was to cool down the polymerization surface of an iCVD chamber and develop a control system to achieve the temperature requirements for the duration of the polymerization process. A cascade of thermoelectric coolers with a liquid stage as heat sink was designed to achieve a temperature difference of 80℃ with the ambient.
